Micro And Nanotechnology Module

Données Générales
Programme Académique	General Engineering Program			Responsable(s) Module : JOUVE Christophe
Type d'EC : Cours	Micro And Nanotechnology Module (LIIAem09EModMN)
TD : 20h00 Travail personnel : 30h00 Durée totale: 50h00	Status	Periode Semester 9	Langue d'enseignement : French/English

Objectifs Généraux
Offer a selection of in-depth classes in a variety of technical and scientific subjects that have been covered over the 5-year program. These modules take a more industrial or applicative approach of the topics through analysis of cases studies.

Contenu
Here we rely on general skills in physics and chemistry as well as on several aspects discussed in the semiconductor technology chapter of the electronics course (semester 5). * Introduction to micro and nano technologies * Micro fabrication, toolbox available, engraving techniques * Description of micro mechanical sensors (pressure, micromotor ...) * Analysis of the design of an electrochemical micro-sensor (ISFET structure), * Nano FET, nano mechanism, current design limits, manufacturing tools, test tools ... * Ethical aspects around nanotechnologies

Contenu

Here we rely on general skills in physics and chemistry as well as on several aspects discussed in the semiconductor technology chapter of the electronics course (semester 5).
* Introduction to micro and nano technologies
* Micro fabrication, toolbox available, engraving techniques
* Description of micro mechanical sensors (pressure, micromotor ...)
* Analysis of the design of an electrochemical micro-sensor (ISFET structure),
* Nano FET, nano mechanism, current design limits, manufacturing tools, test tools ...
* Ethical aspects around nanotechnologies

Prérequis
Electronics courses A&M year3 and particularly "Semiconductor technology" (semester 5)

Bibliographie
Teaching Team documents

Évaluation(s)
N°	Nature	Coefficient	Objectifs
1	Written or oral exam	1	The evaluation is based on the study and the analysis of a scientific article of the field: description of this article and write a document of ten pages in English allowing to show the good understanding of the scientific contributions of the article by enriching it with other scientific bibliographical sources.
2	Written or oral exam	1	Realization of a poster related to the scientific article chosen (the same as the written evaluation) and presentation of this poster to the teachers competent in the field: presentation in English and questions / answers on the contents.